TRITON SINGLE WAFER PLATFORM

TRITON SINGLE WAFER PLATFORM

CUSTOMER ADDED VALUE

• Excellent speed and quality track record 

• Customized to our customer’s needs

• Possibility of processing more than one substrate size per chamber with minimal or no reconfiguration

• Modular platform

• Upgrade- and future-proof

• Highly innovative new wet processes

• Established high-throughput processing chambers