GALAXY / EL BATCH PROCESSING PLATFORM

GALAXY / EL BATCH PROCESSING PLATFORM

CUSTOMER ADDED VALUE

• Identical chambers for manual and fully automated tools in the

modular platform

• Outstanding automation reliability and speed

• Customized to our customer’s needs

• Possibility of processing more than one substrate size per

chamber with change of carrier

• Electroless plating can be added optionally to the Galaxy Platform

• Upgrade- and future-proof

• Established high-throughput processing chambers